About: http://webisa.webdatacommons.org/3918575

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A material such as silicon or silicon germanium having silicon as its principal constituent is suitably utilized for the semiconductor film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr