About: http://webisa.webdatacommons.org/392897305

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Typically, loadlocks are quite dirty, mainly because of gate valves that seal to pump down or vent the loadlock.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com