About: http://webisa.webdatacommons.org/394431582

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a lithographic apparatus, an article, such as a substrate, a mask or a fiducial to be placed in the radiation beam, is held by an article support member, for example, by a clamping electrode, vacuum suction or otherwise.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com