About: http://webisa.webdatacommons.org/395541592

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate body may also be a composite material, such as a silicon plate covered by one or more layers of another etchable material or materials, e.g. silicon nitride, silicon dioxide etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es