About: http://webisa.webdatacommons.org/397451979

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the substrate is silicon or other material deposited on a coated or uncoated mechanical substrate such as glass, plastic, metal foil, or other material, the channel shape will be that seen in FIG. 10b, parts 4 and 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com