| http://www.w3.org/ns/prov#value | - m splitter for combining said first and second laser beams to produce a composite laser beam, and a beam expander for expanding said composite laser beam produced by said beam splitter; a converging lens for converging the coherent light beam radiated by said light source unit; a hemispherical lens disposed in such a manner as to be allowed to be contacted with a surface to be measured of the obje
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