About: http://webisa.webdatacommons.org/399506374

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a flowchart for explaining how to fabricate devices (such as semiconductor chips such as ICs, LCDs, CCDs, and the like) FIG. 10 is a detail flowchart of a wafer process in Step 4 of FIG. 9.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com