About: http://webisa.webdatacommons.org/399653526

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a SEM photograph illustrating the planar characteristic of the bottom structure of a sample manufactured according to the method of manufacturing a micro-actuator of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com