About: http://webisa.webdatacommons.org/4018629

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the invention, polymers such as PMMA (PMMA=PolyMethylMetAcrylate), PC (PC=Polycarbonate), Epon SU-8 (Epoxy-based photoresist), etc. may be applied as a translucent shutter support substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com