About: http://webisa.webdatacommons.org/405952240

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These problems include new arcing phenomena, which are particularly troublesome in the DC or AC reactive sputtering of dielectric or insulating materials such as silicon dioxide, aluminum oxide and zirconium oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com