About: http://webisa.webdatacommons.org/406943703

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective layer 13 and the planarizing insulating layer 14 are formed from, for example, an insulating material such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com