About: http://webisa.webdatacommons.org/408642411

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, if a substrate formed of a material other than silicon is used, ions of the material of the substrate or a substance inert to the material of the substrate may be selected as the impurity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com