About: http://webisa.webdatacommons.org/409490301

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The FET 10 includes a semiconductor substrate 12, for example a silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es