About: http://webisa.webdatacommons.org/409734473

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as claimed in claim 1 wherein said insulator layer is made of a material selected from a group including silicon dioxide, glass and phosphosilicate glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com