About: http://webisa.webdatacommons.org/411210131

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As grown polycrystalline layers deposited at 590??? C. are obtained for both types of dopant, boron (40 sccm diborane) or phosphor (80 sccm phosphine) as shown in FIG. 31.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com