About: http://webisa.webdatacommons.org/413471100

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, lower temperatures, lower ratios of oxygen source gas to fluorine source gas, and optionally lower pressures can provide a ???high selectivity??? relative to surrounding insulating materials such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com