About: http://webisa.webdatacommons.org/41605050

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, during the polishing of an insulating material, such as silicon dioxide, reaction products generated in the polishing slurry, and other debris, collect on the surface of the polishing pad.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au