About: http://webisa.webdatacommons.org/417433911

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In different embodiments, the sensor assembly may be that of a profiler, an atomic force microscope or other types of scanning probe microscopes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com