About: http://webisa.webdatacommons.org/418943158

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph showing the bottom dimension of the resist film with development time as the horizontal axis.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com