About: http://webisa.webdatacommons.org/41953811

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the channel protective film, a material mainly containing silicon oxide, silicon nitride or silicon nitride oxide is formed by a PCVD method or a sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com