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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	gy) and techniques (new kinds of lithography) that facilitate the development, manipulation, and detection of submicrosco
http://www.w3.org/ns/prov#wasQuotedFrom	militaryaerospace.com