| http://www.w3.org/ns/prov#value | - Similarly, the other study shows there is a linear correlation between the number of particles in the wet bath (NB) and on the wafer (NW) [5], i.e., NB = ANW.The value of constant A is also the same for all the pumps if we assume the composition of particles generated by all three tested pumps is the same.
|
