About: http://webisa.webdatacommons.org/440107072

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etch/polish stop layer 36 is preferably a relatively hard insulating material, such as silicon oxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com