About: http://webisa.webdatacommons.org/440210439

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The side wall 104 and top 108 of the chamber 102 are illustratively fabricated of a semiconducting material such as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com