About: http://webisa.webdatacommons.org/440964597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The annealing gas includes helium, hydrogen, or a combination thereof, which is flowed into the chamber at a rate between about 200 sccm and about 10,000 sccm, such as between about 500 and about 1,500 sccm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es