About: http://webisa.webdatacommons.org/443607130

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material of the partition wall 63 is not limited to silicon nitride, but may be an insulating material such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com