| http://www.w3.org/ns/prov#value | - Thus, TFTs were improved in characteristics and reliability because the carbon content was greatly reduced and an improved blocking effect with respect to impurities such as alkali metals was obtained in all of the undercoat film 402, the gate insulating film 405, and the interlayer insulating film 408 as compared to the case where oxide films of the embodiment were not used.
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