About: http://webisa.webdatacommons.org/448603972

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	S5 is a step of removing the semiconductor layer 10 and the repellent layer 20.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr