About: http://webisa.webdatacommons.org/449910609

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Prior to cooling, the wafer is maintained at the target temperature for a short period of time, such as less than about 2 seconds, and particularly for less than about 1 second.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com