About: http://webisa.webdatacommons.org/450991699

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 45(a)-45(m) show an embodiment of the invention for building layers on large substrates in such a manner as to minimize stresses to a large substrate that may result from deposited materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com