About: http://webisa.webdatacommons.org/46219471

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a semiconductor wafer including a second surface opposing the first surface of the polishing pad, wherein at least one of an axis of rotation of the first surface and the second surface is adjustable;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com