About: http://webisa.webdatacommons.org/46864467

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Etcher 340 of system 300 includes but is not limited to etcher means such as wet etching in a chemical solution, which is reactive to surface 301, and dry etching in a vacuum chamber containing plasma and gas reactive to surface 301.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com