PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Many processes require that the wafer be maintained at an elevated temperature over an extended period of time, for example for sintering, reflow, planarization, and other process steps.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.es