| http://www.w3.org/ns/prov#value | - characteristics such as a sensitivity, a resolution, a profile, a coating property, a heat resistance, a dry etching resistance, anadhesion, a substrate dependence, an environmental stability (for example a dimensional stability to a change in time after coating), and a depth of focus (for example a pattern forming property against an out-of-focus state in an irradiation with aradiation), and many
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