About: http://webisa.webdatacommons.org/50124400

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A shallow trench isolation (???STI???) region 22 is formed in substrate 20 and may be various insulating materials such as silicon oxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com