About: http://webisa.webdatacommons.org/57070308

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 2-7 show cross-sections of a substrate during various process steps in manufacturing a semiconductor device, in particular FETs used in forming a CMOS device; according to the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com