About: http://webisa.webdatacommons.org/64184159

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 21A is a fragmentary plane view illustrative of a semiconductor memory device having a trench isolation structure in a fifth step involved in a novel fabrication method in a third embodiment in accordance with the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com