About: http://webisa.webdatacommons.org/6446883

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In our measurements, higher voltage SEM did not improve upon conventional critical dimension (CD)-SEM. Simulations suggest the reason is a failure to overcome a negative surface potential.
http://www.w3.org/ns/prov#wasQuotedFrom	nist.gov