About: http://webisa.webdatacommons.org/66983101

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph of the measured pressure in a chamber for increasing gas flow rates showing the improved processing window obtained by an integrated pump versus a remote pump;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au