About: http://webisa.webdatacommons.org/6698834

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the substrate 10 is silicon and the dielectric protective layer 14 is a thermal oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com