About: http://webisa.webdatacommons.org/68326350

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The in-line defect tester 154 is first powered up 500 to enter referencing information associated with that wafer, such as date and time, for file assignment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com