| http://www.w3.org/ns/prov#value | - As is conventional in the art, in this disclosure, the term "substrate is used in a general sense where it includes one or a number of layers of material, such as 717 (FIG. 10), on which the thin film may be deposited, and also in a particular sense in which it refers to a wafer 751, generally formed of silicon, gallium arsenide, glass, ruby or other material known in the art, on which the other
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