About: http://webisa.webdatacommons.org/72243744

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 104 may be a material such as silicon wafer, glass plate, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca