About: http://webisa.webdatacommons.org/73697613

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, if a phase shifter is formed around each unit pattern of a repetitive pattern such as a pattern used for an ULSI or the like, sub peaks may be generated between transferred unit patterns.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com