About: http://webisa.webdatacommons.org/75344361

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The phase-shifting element may be comprised of a material including photoresist, silicon dioxide, polyimide, silicon nitride, silicon oxynitride, and any combination thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com