About: http://webisa.webdatacommons.org/75462459

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 102 may be made of silicon or it may be made of materials other than silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com