About: http://webisa.webdatacommons.org/80078651

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Herein, the gate insulating film 152 is formed of an inorganic insulating material such as silicon oxide (SiOx) or silicon nitride (SiNx).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com