About: http://webisa.webdatacommons.org/81825065

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In damascene interconnects, this is frequently the interface between copper and an etch stop/diffusion barrier layer of silicon nitride, silicon carbide or other dielectric capping layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com