About: http://webisa.webdatacommons.org/82725918

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Formed on the first interlayer insulating film 4 is a second interlayer insulating film 7 of an insulating material such as a silicon dioxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr