About: http://webisa.webdatacommons.org/84778531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other embodiments, such as shown in FIG. 5, one or more electrodes may be placed on the upper wafer 430.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com